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Flexible Oxide Thin Film Transistors, Memristors, and Their Integration

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ADVANCED FUNCTIONAL MATERIALS
卷 -, 期 -, 页码 -

出版社

WILEY-V C H VERLAG GMBH
DOI: 10.1002/adfm.202213762

关键词

crossbars; flexible substrates; memristors; metal oxide; RRAM; solution-processed; TFTs; vacuum-processed

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Flexible electronics are important for low-power sensors and circuits in wearable electronics and IoT applications. Semiconducting metal-oxides are suitable for flexible electronics and can be integrated with thin film electronics, leading to novel all-metal-oxide devices combining memory and computing on a single node. This review explores recent advances in substrate types, fabrication methods, applications, and monolithic integration.
Flexible electronics have seen extensive research over the past years due to their potential stretchability and adaptability to non-flat surfaces. They are key to realizing low-power sensors and circuits for wearable electronics and Internet of Things (IoT) applications. Semiconducting metal-oxides are a prime candidate for implementing flexible electronics as their conformal deposition methods lend themselves to the idiosyncrasies of non-rigid substrates. They are also a major component for the development of resistive memories (memristors) and as such their monolithic integration with thin film electronics has the potential to lead to novel all-metal-oxide devices combining memory and computing on a single node. This review focuses on exploring the recent advances across all these fronts starting from types of suitable substrates and their mechanical properties, different types of fabrication methods for thin film transistors and memristors applicable to flexible substrates (vacuum- or solution-based), applications and comparison with rigid substrates while additionally delving into matters associated with their monolithic integration.

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