3.8 Article

Fabrication, and Direct Current and cryogenic analysis of SF6-treated AlGaN/GaN Schottky barrier diodes

相关参考文献

注意:仅列出部分参考文献,下载原文获取全部文献信息。
Article Physics, Applied

Mechanism of current-collapse free for lateral GaN Schottky barrier diodes utilizing polarization-induced hole injection

Tao Zhang et al.

Summary: This study investigates a mechanism of current-collapse in high-performance lateral AlGaN/GaN Schottky barrier diodes with a thick single-crystal GaN cap layer, achieving high breakdown voltage and low specific on-resistance through optimized groove anode technique. Injection of holes and neutralization of negatively charged centers play a crucial role in suppressing tunneling current and improving ideality factor.

APPLIED PHYSICS LETTERS (2022)

Article Engineering, Electrical & Electronic

Flip-Chip AlGaN/GaN Schottky Barrier Diode Using Buried-Ohmic Anode Structure With Robust Surge Current Ruggedness and Transient Energy Sustaining Capability

Feng Zhou et al.

Summary: This work demonstrates, for the first time, the ability of AlGaN/GaN SBDs to withstand both surge current shocks and transient energy, addressing the device reliability requirements for inductive switching applications. The high surge current density and critical transient dissipating energy density achieved in this study, along with superior switching performance, make significant progress towards the promise of AlGaN/GaN SBDs for high-reliability and high-power applications.

IEEE TRANSACTIONS ON ELECTRON DEVICES (2022)

Article Physics, Multidisciplinary

Schottky barrier inhomogeneity in (Pd / Au) Al0.22 Ga0.78N/ GaN/SiC HEMT: Triple Gaussian distributions

I Jabbari et al.

Summary: The temperature dependence of electrical properties of (Au/Pd)/Al0.22 Ga0.78N/ GaN Schottky barrier diodes (SBDs) has been analyzed through forward Igs (Vgs) measurements from 60-320 K. Results show that barrier height, ideality factor, and series resistance exhibit strong temperature dependence, indicating the presence of barrier inhomogeneities at the interface.

CHINESE JOURNAL OF PHYSICS (2021)

Article Materials Science, Multidisciplinary

Improving the Performance of Deep Recessed Anode AlGaN/GaN Schottky Barrier Diode by Post Etching Treatment

Kai Liu et al.

Summary: The study improved the performance of recessed anode AlGaN/GaN Schottky barrier diodes using fluorine (F) plasma and HCl solution treatments as post etching treatment, ultimately optimizing forward and reverse currents through a designed deep recessed anode structure and changes in electron transport paths.

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE (2021)

Article Engineering, Electrical & Electronic

Ultra-compact, High-Frequency Power Integrated Circuits Based on GaN-on-Si Schottky Barrier Diodes

Luca Nela et al.

Summary: This article introduces the performance and potential of gallium nitride diodes, demonstrating the advantages of the gallium nitride-on-silicon structure and its application in power integrated circuits. By developing a new type of SBD, the pathway is paved for efficient and compact power converters.

IEEE TRANSACTIONS ON POWER ELECTRONICS (2021)

Article Computer Science, Information Systems

The Influence of Design on Electrical Performance of AlGaN/GaN Lateral Schottky Barrier Diodes for Energy-Efficient Power Applications

Egor Polyntsev et al.

Summary: Through a series of experiments, an optimal set of parameters was selected to optimize the performance of lateral Schottky barrier diodes, providing the best electrical characteristics. The obtained electrical characteristics show great potential for use in energy-efficient power applications, such as 5G multiband and multistandard wireless base stations.

ELECTRONICS (2021)

Article Physics, Applied

Forward and reverse current transport mechanisms in tungsten carbide Schottky contacts on AlGaN/GaN heterostructures

G. Greco et al.

Summary: This paper investigated the forward and reverse current transport mechanisms in tungsten carbide (WC) Schottky contacts on AlGaN/GaN heterostructures, before and after annealing at 400 degrees C. Different transport mechanisms were identified under different bias conditions, with distinct temperature dependencies on current transport.

JOURNAL OF APPLIED PHYSICS (2021)

Article Engineering, Electrical & Electronic

Thin-barrier gated-edge termination AlGaN/GaN Schottky barrier diode with low reverse leakage and high turn-on uniformity

Xuanwu Kang et al.

Summary: In this study, novel AlGaN/GaN Schottky barrier diodes (SBDs) with high device uniformity were fabricated using thin-barrier (5 nm) AlGaN/GaN heterostructures. By combining a gated-edge termination (GET) design and high-quality SiN (x) deposition, low reverse leakage current and high reverse breakdown voltage were achieved. The proposed diode process flow is also compatible with AlGaN/GaN high-electron-mobility transistors, showing promise for integration in the smart GaN platform.

SEMICONDUCTOR SCIENCE AND TECHNOLOGY (2021)

Article Physics, Condensed Matter

GaN-based super-lattice Schottky barrier diode with low forward voltage of 0.81V

Ang Li et al.

Summary: This paper presents a high-performance AlGaN/GaN Schottky barrier diode (SBD) based on a super-lattice structure with optimized design and fabrication processes, achieving significant improvements in sheet resistance, turn-on voltage, and forward voltage.

SUPERLATTICES AND MICROSTRUCTURES (2021)

Article Computer Science, Information Systems

A Study on the Optimized Ohmic Contact Process of AlGaN/GaN-Si MIS-HEMTs

He Guan et al.

Summary: In this study, the optimization of the ohmic contact process for AlGaN/GaN-Si based MIS-HEMTs was conducted. It was found that using NLD to etch the SiN passivation layer, O plasma treatment for surface cleaning, and ICP process for etching depth can effectively reduce the contact resistance of the device.

IEEE ACCESS (2021)

Article Engineering, Electrical & Electronic

Ultrathin-Barrier AlGaN/GaN Hybrid-Anode-Diode With Optimized Barrier Thickness for Zero-Bias Microwave Mixer

Qi Zhou et al.

IEEE TRANSACTIONS ON ELECTRON DEVICES (2020)

Article Engineering, Electrical & Electronic

Optimization of Ohmic Contact for AlGaN/GaN HEMT on Low-Resistivity Silicon

Bhavana Benakaprasad et al.

IEEE TRANSACTIONS ON ELECTRON DEVICES (2020)

Article Materials Science, Multidisciplinary

Forward Current Transport Properties of AlGaN/GaN Schottky Diodes Prepared by Atomic Layer Deposition

Hogyoung Kim et al.

COATINGS (2020)

Proceedings Paper Engineering, Electrical & Electronic

5 kV Multi-Channel AlGaN/GaN Power Schottky Barrier Diodes with Junction-Fin-Anode

M. Xiao et al.

2020 IEEE INTERNATIONAL ELECTRON DEVICES MEETING (IEDM) (2020)

Article Engineering, Electrical & Electronic

Ti/Au/Al/Ni/Au Low Contact Resistance and Sharp Edge Acuity for Highly Scalable AlGaN/GaN HEMTs

Yogendra K. Yadav et al.

IEEE ELECTRON DEVICE LETTERS (2019)

Article Engineering, Electrical & Electronic

Investigation of a Hybrid Approach for Normally-Off GaN HEMTs Using Fluorine Treatment and Recess Etch Techniques

Gokhan Kurt et al.

IEEE JOURNAL OF THE ELECTRON DEVICES SOCIETY (2019)

Article Engineering, Electrical & Electronic

A High-Efficiency High-Density Wide-Bandgap Device-Based Bidirectional On-Board Charger

Bin Li et al.

IEEE JOURNAL OF EMERGING AND SELECTED TOPICS IN POWER ELECTRONICS (2018)

Article Engineering, Electrical & Electronic

Effects of Rapid Thermal Annealing on Ar Inductively Coupled Plasma-Treated n-Type 4H-SiC Schottky and Ohmic Contacts

Jung-Chien Cheng et al.

IEEE TRANSACTIONS ON ELECTRON DEVICES (2018)

Article Engineering, Electrical & Electronic

High-temperature studies of multiple fluorinated traps within an Al2O3 gate dielectric for E-Mode AlGaN/GaN power MIS-HEMTs

Yun-Hsiang Wang et al.

SEMICONDUCTOR SCIENCE AND TECHNOLOGY (2016)

Article Engineering, Electrical & Electronic

IVT measurements of GaN power Schottky diodes with drift layers grown by HVPE on HVPE GaN substrates

R. P. Tompkins et al.

JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS (2016)

Article Engineering, Electrical & Electronic

Impact of fluorine plasma treatment on AlGaN/GaN high electronic mobility transistors by simulated and experimental results

Zhu Gao et al.

MICROELECTRONIC ENGINEERING (2016)

Article Engineering, Electrical & Electronic

The ESD protection characteristic and low-frequency noise analysis of GaN Schottky barrier diode with fluorine-based plasma treatment

Hsien-Chin Chiu et al.

MICROELECTRONICS RELIABILITY (2016)

Article Engineering, Electrical & Electronic

High Reverse Blocking and Low Onset Voltage AlGaN/GaN-on-Si Lateral Power Diode With MIS-Gated Hybrid Anode

Qi Zhou et al.

IEEE ELECTRON DEVICE LETTERS (2015)

Article Physics, Condensed Matter

Electrical properties and carrier transport mechanism in V/p-GaN Schottky diode at high temperature range

M. Siva Pratap Reddy et al.

SUPERLATTICES AND MICROSTRUCTURES (2015)

Article Physics, Applied

Metal induced inhomogeneous Schottky barrier height in AlGaN/GaN Schottky diode

Jong-Hoon Shin et al.

APPLIED PHYSICS LETTERS (2013)

Article Physics, Applied

Forward current transport mechanisms in Ni/Au-AlGaN/GaN Schottky diodes

Dawei Yan et al.

JOURNAL OF APPLIED PHYSICS (2013)

Article Engineering, Electrical & Electronic

1.4-kV Breakdown Voltage for AlGaN/GaN High-Electron-Mobility Transistors on Silicon Substrate

Susai Lawrence Selvaraj et al.

IEEE ELECTRON DEVICE LETTERS (2012)

Article Physics, Applied

Electrical characterization of (Ni/Au)/Al0.25Ga0.75N/GaN/SiC Schottky barrier diode

Salah Saadaoui et al.

JOURNAL OF APPLIED PHYSICS (2011)

Article Engineering, Electrical & Electronic

C-V characterization of SF6 plasma treated AlGaN/GaN heterostructures

J. Osvald et al.

MICROELECTRONIC ENGINEERING (2010)

Article Physics, Applied

Diffusion mechanism and the thermal stability of fluorine ions in GaN after ion implantation

M. J. Wang et al.

JOURNAL OF APPLIED PHYSICS (2009)

Article Engineering, Electrical & Electronic

Tunneling current via dislocations in Schottky diodes on AlInN/AlN/GaN heterostructures

Engin Arslan et al.

SEMICONDUCTOR SCIENCE AND TECHNOLOGY (2009)

Article Physics, Applied

Effect of threading dislocation density on Ni/n-GaN Schottky diode I-V characteristics

A. R. Arehart et al.

JOURNAL OF APPLIED PHYSICS (2006)

Article Engineering, Electrical & Electronic

High-performance enhancement-mode AlGaN/GaN HEMTs using fluoride-based plasma treatment

Y Cai et al.

IEEE ELECTRON DEVICE LETTERS (2005)

Article Electrochemistry

Carbon rich plasma-induced damage in silicon nitride etch

JH Ye et al.

JOURNAL OF THE ELECTROCHEMICAL SOCIETY (2000)