Diffusive separation in rarefied plume interaction

In the present study, we propose the use of a light, inert carrier gas to support deposition uniformity and rate in continuous physical vapor deposition, in which closely spaced slots or nozzles are required to achieve a sufficiently high deposition rate. Interaction shocks between the emerging rarefied plumes cause undesired nonuniformities in the deposited coating. The present work evaluates the effect of adding a carrier gas on the interaction shock. We study the interaction between two sonic plumes consisting of a binary mixture, i.e., silver as coating material and helium as a light inert carrier gas, by direct simulation Monte Carlo. While the inlet Mach and Knudsen numbers were kept constant, the fraction of carrier gas was varied to single out the effect of species separation. The influence of rarefaction on species separation was also studied. Species separation produces a high carrier-gas fraction in the periphery and an accumulation of the heavier species in the jet core. The resulting change in the speed of sound alters the local expansion characteristics and, thus, shifts the shock location and weakens the shock. These phenomena intensify with the degree of rarefaction. It is shown that adding a light carrier gas increases deposition rate may enhance uniformity and reduce stray deposition. Published under an exclusive license by the AVS.

Automated summary

This study proposes the use of a light inert carrier gas to improve deposition uniformity and rate in continuous physical vapor deposition. The effect of adding a carrier gas on interaction shocks is evaluated. The study shows that species separation caused by interaction shocks can result in nonuniform coatings, and this phenomenon intensifies with higher degrees of rarefaction.