Low-Temperature Synthesis of Large-Scale Molybdenum Disulfide Thin Films Directly on a Plastic Substrate Using Plasma-Enhanced Chemical Vapor Deposition

ADVANCED MATERIALS

卷 27, 期 35, 页码 5223-5229

WILEY-V C H VERLAG GMBH

flexible sensor; low temperature; molybdenum disulfide (MoS2); plasma-enhanced chemical vapor deposition (PECVD); plastic substrate

Chemistry, Multidisciplinary Chemistry, Physical Nanoscience & Nanotechnology Materials Science, Multidisciplinary Physics, Applied Physics, Condensed Matter

1. National Research Foundation of Korea (NRF) - Korean Government Ministry of Science, ICT and Future Planning (MSIP) [2009-0083540]
2. Center for Advanced Soft-Electronics - Ministry of Science, ICT and Future Planning (MSIP) [2011-0031630]
3. Global Frontier R&D Program on Center for Multiscale Energy System - National Research Foundation under the Ministry of Science, ICT and Future Planning, Korea [NRF-2012M3A6A7054863]
4. National Research Foundation of Korea [2011-0031630, 2012M3A6A7054863] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)