4.7 Article

Cathodic arc deposition of high entropy alloy thin films with controllable microstructure

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Summary: Detailed characterization of AlCrFeCoNiCu0.5 thin films was conducted using techniques such as high-resolution transmission electron microscopy, X-ray photoelectron spectroscopy, and atomic force microscopy. The study revealed the key mechanism of film growth, as well as elemental segregation and surface morphology changes.

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