期刊
NATURE ELECTRONICS
卷 5, 期 11, 页码 784-793出版社
NATURE PORTFOLIO
DOI: 10.1038/s41928-022-00868-x
关键词
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资金
- JSPS KAKENHI [JP18H05469, 17H06149]
- National Research Foundation Singapore (NRF) under NRF's Medium Sized Centre: Singapore Hybrid-Integrated Next-Generation mu-Electronics (SHINE) Centre funding programme
- Agency for Science, Technology and Research (A*STAR) under its AME Programmatic Funding Scheme [A18A1b0045]
- Science and Technology Development Fund, Macau SAR (FDCT) [0059/2021/AFJ, 0040/2021/A1]
- National Research Foundation, Prime Minister's Office, Singapore, under the NRF Investigatorship Programme [NRF-NRFI05-2019-0003]
- NUS NANONASH Programme [NUHSRO/2020/002/NanoNash/LOA, R143000B43114]
Polydimethylsiloxane-gold conductors with controlled microcrack morphology in the gold film, approximately 1.3 μm thick, have been developed. These conductors can stretch up to 300% and maintain high conductivity. They can be used to create breathable and water-resistant on-skin electrodes, pressure sensors, and implantable nerve electrodes.
Polydimethylsiloxane-gold conductors that are 1.3 mu m thick and have controlled morphology of microcracks in the gold film can be used to create breathable and water-resistant electrodes for recording electrocardiogram signals, as well as on-skin pressure sensors and implantable nerve electrodes. On-skin and implantable electronics require elastic conductors that are only a few micrometres thick and soft enough to form a seamless contact with three-dimensional structures. However, fabricating thin conductors that are mechanically durable and have consistent electrical properties with stretching is challenging. Here we report polydimethylsiloxane (PDMS)-gold conductors that are around 1.3 mu m thick and have a controlled morphology of microcracks in the gold film. The microcracks are formed by evaporating a 50-nm-thick gold film onto a 1.2-mu m-thick PDMS film that is supported during fabrication by a 100-mu m-thick PDMS film on glass; thermal expansion of the thick PDMS film causes the evaporated gold to form a microcracked structure on the thin PDMS. The resulting conductors can be stretched by up to 300% and remain highly conductive after strain release. We use them to create on-skin electrodes that are breathable and water resistant, and can continuously record electrocardiogram signals. We also use the conductors to create on-skin sensors with less than 3 mu m thickness that can detect small mechanical forces and create implantable nerve electrodes that can provide signal recording and stimulation.
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