期刊
ACS OMEGA
卷 -, 期 -, 页码 -出版社
AMER CHEMICAL SOC
DOI: 10.1021/acsomega.2c04387
关键词
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资金
- National Research Foundation of Korea (NRF) - Ministry of Science and ICT [NRF 2020M3F3A2A01081572, NRF-2020M3D1A2101933]
- Ministry of Trade, Industry & Energy (MOTIE, Korea) [00144157]
- Korea Evaluation Institute of Industrial Technology (KEIT) [00144157] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
In this research, epitaxial growth of ((2) over bar 01)-oriented ss-Ga2O3 thin films on (001) Si substrate was achieved using pulsed laser deposition technique with epitaxial yttria-stabilized zirconia (YSZ) buffer layers. The films showed biaxial compressive strain on YSZ single-crystal substrates and biaxial tensile strain on YSZ-buffered Si substrates. Postannealing improved the crystalline quality of the films. High-resolution X-ray diffraction analyses revealed eight in-plane domain variants in the epitaxial ((2) over bar 01) ss-Ga2O3 thin films on Si, allowing for the large difference in the crystal structure between monoclinic ss-Ga2O3 and cubic YSZ. These results provide a pathway for integrating epitaxial ss-Ga2O3 thin films on Si substrates and expanding their application beyond high-power electronics.
We report the epitaxial growth of ((2) over bar 01)-oriented ss-Ga2O3 thin films on a (001) Si substrate using the pulsed laser deposition technique employing epitaxial yttria-stabilized zirconia (YSZ) buffer layers. Epitaxial ss-Ga2O3 thin films possess a biaxial compressive strain on YSZ single-crystal substrates while they exhibit a biaxial tensile strain on YSZ-buffered Si substrates. Postannealing improves the crystalline quality of ss-Ga2O3 thin films. High-resolution X-ray diffraction analyses reveal that the epitaxial ((2) over bar 01) ss-Ga2O3 thin films on Si have eight in-plane domain variants to accommodate the large difference in the crystal structure between monoclinic ss-Ga2O3 and cubic YSZ. The results provide a pathway to integrate epitaxial ss-Ga2O3 thin films on a Si gold standard substrate, which will expand the application scope beyond high-power electronics.
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