Synthesis of 2-DOF Decoupled Rotation Stage with FEA-Based Neural Network

Transfer printing technology has developed rapidly in the last decades, offering a potential demand for 2-DOF rotation stages. In order to remove decoupling modeling, improve motion accuracy, and simplify the control method, the 2-DOF decoupled rotation stages based on compliant mechanisms present notable merits. Therefore, a novel 2-DOF decoupled rotation stage is synthesized of which the critical components of decoupling are the topological arrangement and a novel decoupled compound joint. To fully consider the undesired deformation of rigid segments, an FEA-based neural network model is utilized to predict the rotation strokes and corresponding coupling ratios, and optimize the structural parameters. Then, FEA simulations are conducted to investigate the static and dynamic performances of the proposed 2-DOF decoupled rotation stage. The results show larger rotation strokes of 4.302 mrad in one-axis actuation with a 1.697% coupling ratio, and 4.184 and 4.151 mrad in two-axis actuation with undesired Rz rotation of 0.014 mrad with fewer actuators than other works. In addition, the first natural frequency of 2151 Hz is also higher, enabling a wider working frequency range.

Automated summary

In the last decades, the rapid development of transfer printing technology has created a potential demand for 2-DOF rotation stages. The use of compliant mechanisms in 2-DOF decoupled rotation stages has proven to be advantageous in decoupling modeling, improving motion accuracy, and simplifying control methods. A novel 2-DOF decoupled rotation stage was synthesized, with the critical components being the topological arrangement and a new decoupled compound joint. Finite element analysis (FEA)-based neural network modeling and optimization were applied to predict rotation strokes, coupling ratios, and optimize structural parameters. FEA simulations were then conducted to investigate the static and dynamic performances of the proposed rotation stage, demonstrating larger rotation strokes, lower coupling ratios, and higher natural frequencies compared to other works.