期刊
FRONTIERS IN CHEMISTRY
卷 10, 期 -, 页码 -出版社
FRONTIERS MEDIA SA
DOI: 10.3389/fchem.2022.1082738
关键词
femtosecond laser; 3D processing; micro-nano fabrication; transparent hard and brittle materials; hybrid processing strategy
资金
- National Natural Science Foundation of China [62004059]
- Natural Science Foundation of Tianjin [20JCZDJC00430]
- Natural science research Foundation of Hebei University of Technology [JBKYXX2203]
- Natural Science Foundation of Hebei Province [F2021202047]
- Funding Projects for the Introduction of Overseas Staff of Hebei Province [C20210334]
- Key Laboratory Fund Project [2021JCJQLB055004]
This article summarizes the fundamentals and research progress of femtosecond laser hybrid processing strategies of transparent hard and brittle materials in recent years, and discusses the challenges and application prospects of these techniques.
With high hardness, high thermal stability, chemical inertness and excellent optoelectronic properties, transparent hard and brittle materials have drawn significant attentions in frontier domains such as aerospace, photoelectric detection, and high-intensity lasers. Femtosecond laser processing technology demonstrates great potential for transparent hard and brittle materials processing due to its outstanding advantages such as non-contact, true 3D processing and programmable design. However, high-energy laser ablation usually causes severe damage to the surface of the materials, resulting in low processing accuracy, low processing efficiency and poor surface quality. Femtosecond laser hybrid processing strategies have been proven to be an effective solution to solve the above problems. This mini-review summarizes the fundamentals and research progress of femtosecond laser hybrid processing strategies of transparent hard and brittle materials in recent years. Moreover, the challenges and application prospects of these techniques are discussed.
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