4.6 Review

Research advances of femtosecond laser-induced nanogratings for transparent materials

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Article Optics

100-Layer Error-Free 5D Optical Data Storage by Ultrafast Laser Nanostructuring in Glass

Huijun Wang et al.

Summary: A high capacity and ultra-long lifetime 5D optical data storage using femtosecond-laser-induced nanopore structures in silica glass has been realized. This technology allows recording and retrieving thousands of layers of multibit digital data with >99% transmission and minimal readout error.

LASER & PHOTONICS REVIEWS (2022)

Article Engineering, Manufacturing

Irregular LIPSS produced on metals by single linearly polarized femtosecond laser

Dongshi Zhang et al.

Summary: This study demonstrates the generation of supra-wavelength periodic surface structures (SWPSS) on Sn and triangular and rhombic laser-induced periodic surface structures (LIPSS) on W, Mo, Ta, and Nb using a single linearly polarized femtosecond laser. The SWPSS patches possess independent orientations, breaking the traditional rules. The maximal period reported for SWPSS is 25 μm, while the formation of LIPSS depends on material composition. The study also characterizes the reflectance and iridescence of the prepared SWPSS and LIPSS.

INTERNATIONAL JOURNAL OF EXTREME MANUFACTURING (2022)

Article Chemistry, Multidisciplinary

Free-Form Micro-Optics Out of Crystals: Femtosecond Laser 3D Sculpturing

Jian-Guan Hua et al.

Summary: This work presents a universal and flexible technology for the fabrication of crystalline micro-optics with required shape and surface roughness. By combining femtosecond laser ablation with high-temperature treatment, the rough non-crystalline layer caused by ablation is removed and the surface roughness is reduced to approximately 2 nm without changing the structure shape. This technology offers nanoscale resolution and free-form 3D manufacturing capability for various crystals, providing a new approach to fabricate micro-/integrated-optics and nonlinear optical elements.

ADVANCED FUNCTIONAL MATERIALS (2022)

Article Chemistry, Multidisciplinary

Manipulation of Subwavelength Periodic Structures Formation on 4H-SiC Surface with Three Temporally Delayed Femtosecond Laser Irradiations

Wanlin He et al.

Summary: In this study, we demonstrate a new approach to control the formation of low spatial frequency surface structures on 4H-SiC crystal surface by using three temporally delayed femtosecond laser beams. By manipulating the time delay among the laser beams, we can flexibly switch between two types of surface structures. The experimental results are well explained by a physical model and provide a simple and controllable method for the large-scale assembly of complex functional nanostructures on semiconductor materials.

NANOMATERIALS (2022)

Article Optics

Biomimetic sapphire windows enabled by inside-out femtosecond laser deep-scribing

Xue-Qing Liu et al.

Summary: In this study, an inside-out femtosecond laser deep scribing technology combined with etching process was used to fabricate biomimetic micro/nanostructures with high aspect ratio on ultrahard materials. The use of a sacrificial layer of silicon oxide for surface protection effectively avoided surface damage and allowed the fabrication of high-quality microstructures. As a proof-of-concept application, a moth-eye inspired antireflective window with sub-wavelength pyramid arrays was produced on sapphire surface, achieving broadband and high transmittance.

PHOTONIX (2022)

Article Materials Science, Ceramics

Femtosecond laser modification of silicon carbide substrates and its influence on CMP process

Xiaozhu Xie et al.

Summary: This paper focuses on enhancing the efficiency of chemical mechanical polishing (CMP) of hard-to-process SiC substrates by irradiating them with femtosecond laser. The effects of different laser processing parameters on the surface morphology of SiC were discussed, along with the influences of surrounding conditions. It was found that the formation of Si-O compound on the laser-irradiated SiC surfaces and the creation of uniform periodic ripple structures can improve surface flatness.

CERAMICS INTERNATIONAL (2021)

Article Optics

Evolution of self-organized nanograting from the pre-induced nanocrack-assisted plasma-laser coupling in sapphire

Qinxiao Zhai et al.

Summary: The period of nanograting in sapphire changes from 320 to 398 nm with increasing laser fluence, similar to the trend observed in near-subwavelength ripples on the material surface.

APPLIED PHYSICS B-LASERS AND OPTICS (2021)

Article Materials Science, Ceramics

Laser Writing of Polarization-Dependent Birefringence in Sodium-Borate Glasses

S. S. Fedotov et al.

Summary: The study determined the conditions for the formation of microdomains with polarization-dependent birefringence by a femtosecond laser beam in sodium-borate glasses with different Na2O content. It was found that an increase in Na2O content results in a decrease in the minimum number of pulses required to form zones with polarization-dependent birefringence, and under certain conditions, a special type of modification can be formed where the slow axis of birefringence is parallel to the polarization plane of the laser beam.

GLASS AND CERAMICS (2021)

Article Materials Science, Ceramics

Femtosecond laser-induced birefringent microdomains in sodium-borate glass for highly secure data storage

Sergey Fedotov et al.

Summary: This paper discusses the inscription of polarization-sensitive birefringent structures of two types by femtosecond laser pulses, revealing the dependence of retardance and slow axis of birefringence on laser exposure parameters. The thermal stability of both types of structures is examined, and the possibility of highly secure data storage based on the different thermal behavior of the laser-modified region is demonstrated.

JOURNAL OF THE AMERICAN CERAMIC SOCIETY (2021)

Article Materials Science, Composites

Femtosecond laser polishing of SiC/SiC composites: Effect of incident angle on surface topography and oxidation

Zhaoxuan Yan et al.

Summary: This study reports a new ultrafast laser polishing method for SiC/SiC composites and discusses the influence of different incident angles in detail. The results show that as the incident angle increases, the polishing quality of SiC/SiC composites is significantly improved.

JOURNAL OF COMPOSITE MATERIALS (2021)

Article Materials Science, Multidisciplinary

Enhanced selective solar absorption of surface nanotextured semi-insulating 6H-SiC

M. Mastellone et al.

OPTICAL MATERIALS (2020)

Article Materials Science, Ceramics

Laser Writing of Polarization-Sensitive Birefringence in Sodium-Borosilicate Glass

S. Lotarev et al.

GLASS AND CERAMICS (2019)

Article Engineering, Electrical & Electronic

Molecular dynamics study on femtosecond laser aided machining of monocrystalline silicon carbide

Binbin Meng et al.

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING (2019)

Article Chemistry, Multidisciplinary

Laser-Inscribed Stress-Induced Birefringence of Sapphire

Hua Fan et al.

NANOMATERIALS (2019)

Review Engineering, Manufacturing

Hybrid femtosecond laser three-dimensional micro-and nanoprocessing: a review

Koji Sugioka

INTERNATIONAL JOURNAL OF EXTREME MANUFACTURING (2019)

Proceedings Paper Physics, Applied

Equation of state for computer simulation of metal ablation by femtosecond laser pulses

R. V. Davydov et al.

INTERNATIONAL CONFERENCE PHYSICA.SPB/2016 (2017)

Article Mechanics

Fabrication of micro-scale gratings for moire method with a femtosecond laser

Gaosheng Yan et al.

THEORETICAL AND APPLIED MECHANICS LETTERS (2016)

Article Multidisciplinary Sciences

Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining

Jintian Lin et al.

SCIENTIFIC REPORTS (2015)

Article Materials Science, Ceramics

Systematic Control of Structural Changes in GeO2 Glass Induced by Femtosecond Laser Direct Writing

Taiga Asai et al.

JOURNAL OF THE AMERICAN CERAMIC SOCIETY (2015)

Article Physics, Applied

Ultrashort laser pulse induced nanogratings in borosilicate glass

Felix Zimmermann et al.

APPLIED PHYSICS LETTERS (2014)

Article Chemistry, Physical

Fabrication of through holes in silicon carbide using femtosecond laser irradiation and acid etching

Vanthanh Khuat et al.

APPLIED SURFACE SCIENCE (2014)

Article Nanoscience & Nanotechnology

Femtosecond-laser Nanostructuring in Glass

Yasuhiko Shimotsuma et al.

JOURNAL OF LASER MICRO NANOENGINEERING (2014)

Article Materials Science, Multidisciplinary

Femtosecond laser color marking of metal and semiconductor surfaces

Andrey A. Ionin et al.

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING (2012)

Article Physics, Applied

Exciton mediated self-organization in glass driven by ultrashort light pulses

Martynas Beresna et al.

APPLIED PHYSICS LETTERS (2012)

Article Physics, Applied

Radially polarized optical vortex converter created by femtosecond laser nanostructuring of glass

Martynas Beresna et al.

APPLIED PHYSICS LETTERS (2011)

Article Chemistry, Multidisciplinary

Ultrafast Manipulation of Self-Assembled Form Birefringence in Glass

Yasuhiko Shimotsuma et al.

ADVANCED MATERIALS (2010)

Article Physics, Applied

Efficient frequency doubling in femtosecond laser-written waveguides in lithium niobate

Jonas Burghoff et al.

APPLIED PHYSICS LETTERS (2006)

Article Chemistry, Physical

Femtosecond laser micro-structuring of alumina ceramic

W Perrie et al.

APPLIED SURFACE SCIENCE (2005)

Article Physics, Applied

Pulse duration dependence of femtosecond-laser-fabricated nanogratings in fused silica

C Hnatovsky et al.

APPLIED PHYSICS LETTERS (2005)

Article Physics, Applied

Nano-modification inside transparent materials by femtosecond laser single beam

Y Shimotsuma et al.

MODERN PHYSICS LETTERS B (2005)

Article Physics, Applied

Embedded anisotropic microreflectors by femtosecond-laser nanomachining

JD Mills et al.

APPLIED PHYSICS LETTERS (2002)

Article Physics, Applied

Memorized polarization-dependent light scattering in rare-earth-ion-doped glass

JR Qiu et al.

APPLIED PHYSICS LETTERS (2000)