期刊
RESULTS IN PHYSICS
卷 43, 期 -, 页码 -出版社
ELSEVIER
DOI: 10.1016/j.rinp.2022.106118
关键词
III-nitride; 2D GaN; CVD; Liquid metal substrate
资金
- Fundamental Research Funds for the Central Universities
- Research Funds of Renmin Univer-sity of China
- Science Technology Program of Fujian Province
- Beijing Municipal Natural Science Foundation
- [21XNLG26]
- [2020H4010]
- [2192024]
This study reports the successful synthesis of 2D GaN crystals by chemical vapor deposition and identifies the nitrogen source flow as a key factor in the growth mode of GaN.
As a class of non-layered compounds, ultrathin III-V semiconductors possess excellent physical and chemical properties, are promising candidates for optoelectronic and thermoelectric applications. Due to the strong chemical bonds both in plane and out of plane, the controllable growth of two-dimensional (2D) III-V semi-conductors is quite challenging. In this study, we report the successful synthesis of 2D GaN crystals by chemical vapor deposition (CVD) on liquid Ga. The nitrogen source flow is found to be a key factor that governs the transformation of GaN growth from 2D layered mode to three-dimensional (3D) island mode. This study provides further understanding on the growth of non-layered 2D III-nitride materials.
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