期刊
ACS PHOTONICS
卷 9, 期 12, 页码 3855-3862出版社
AMER CHEMICAL SOC
DOI: 10.1021/acsphotonics.2c00791
关键词
opto-mechanics; silicon-on-insulator; antenna; radiation pressure; cavity
类别
资金
- Agence National de la Recherche (ANR) [ANR-18-CE24-0023-01, ANR-17-CE09-0041]
- Agence Nationale de la Recherche (ANR) [ANR-17-CE09-0041, ANR-18-CE24-0023] Funding Source: Agence Nationale de la Recherche (ANR)
This research demonstrates a new opto-mechanical confinement approach that utilizes subwavelength structuration of silicon to tightly confine photons and phonons in non-suspended silicon waveguides, fully compatible with standard silicon photonics. Experimental results show high-quality optical excitation and readout of mechanical modes in optomechanical microresonators under ambient conditions and room temperature.
Integrated optomechanics finds increasi n g l y broad-ening applications, requiring tight confinement of photons and phonons wit h i n nanometric-scale photonic circuits. Howe v e r , most existing integrated optomechanical devices use unconventional materials or suspended structures that hinder co-integration with scalable photonic technologies. Here, we show a new opto-mechanical confinement approach, usi n g subwavelength structura-tion of silicon to tightly confine near-infrared photons and 600-MHz phonons in nonsuspended silicon waveguides, fully compatible with standard silicon photonics. Indeed, phonons are confined by velocity reduction in silicon and destructive interference of radiation to the cladd i n g , while photons are confined by metamaterial index guiding. We experimentally demonstrate optomechanical microresonators with optical excitation and readout of mechanical modes with a record quality factor of 1120 for silicon-on-insulator devices, measured under ambient conditions and room temperature. The measured optical quality factor is similar to 40,000, and the estimated coupling rate is 51 +/- 18 kHz. These results are the first step for a new generation of optomechanical devices implemented with scalable silicon photonic technology, having great potential for applications in optical and wireless communications, radar, sensing, metrology, and quantum technologies.
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