☆ 4.6 Article

Aluminum Nitride-Based Adjustable Effective Electromechanical Coupling Coefficient Film Bulk Acoustic Resonator

MICROMACHINES (2023)

Influence of Etching Trench on Keff2 of Film Bulk Acoustic Resonator

Chao Gao et al.

Summary: As radio-frequency communication becomes more common, film bulk acoustic resonators (FBAR) have attracted attention for their superior performance. This study proposes a method to tune the FBAR's performance by etching the piezoelectric material, and investigates the effect of etching trench position on the FBAR's properties.

MICROMACHINES (2022)

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Article Chemistry, Multidisciplinary

BAW Resonator with an Optimized SiO2/Ta2O5 Reflector for 5G Applications

Lu Lv et al.

Summary: In this study, a lithium niobate film was successfully transferred onto a substrate and solidly mounted resonators with a reflector were fabricated. By using an optimized design of a Bragg reflector, acoustic energy leakage was effectively suppressed, and the influence on parasitic modes and filter out-of-band suppression was analyzed.

ACS OMEGA (2022)

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Review Chemistry, Analytical