期刊
MATERIALS
卷 15, 期 23, 页码 -出版社
MDPI
DOI: 10.3390/ma15238291
关键词
magnetron sputtering; Ta2O5; TaN; friction; wear; surface morphology
类别
资金
- National Key R&D Program of China
- National Defense Industrial Technology Development Program
- [2021YFB3400401]
- [JCKY2018419C101]
Ta2O5 was deposited on quartz glass and Si substrates as a protective coating. The introduction of N-2 was found to reduce the surface roughness and increase the hardness and elastic modulus of the coatings.
Ta2O5 was deposited on quartz glass and Si substrates as a protective coating. The inherent RF magnetron sputtering power of 140 W was maintained during the deposition process. During the deposition process, amounts of 5%, 10%, and 15% of N-2 were injected, and the total sputtering gas (N-2+Ar) flow was kept at 40 sccm. The microstructure and surface morphology of the coatings were characterized, and the friction and wear experiments of the coatings were carried out. The results show that the coatings' surface is smooth and the main chemical compositions are Ta, O, and N. The maximum average roughness of the coatings was prepared by pure argon sputtering. It is proved that the introduction of N-2 reduces the surface roughness of the coatings and increases the surface hardness and elastic modulus of the coatings. Adhesive wear and brittle fracture are the two main wear forms of coatings. The wear debris is mainly composed of columnar particles and a flake structure.
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