期刊
VACUUM
卷 207, 期 -, 页码 -出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.vacuum.2022.111653
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This study investigated hybrid coatings of CrN + Cr2O3/TiO2 type obtained using the hybrid PVD/ALD technology on a Cr-Ni-Mo (316L) stainless steel substrate. The coatings were tested for their structural, electrochemical, tribological properties, and adhesion to the substrate. The results showed that the electrochemical properties and corrosion resistance of the coatings were significantly improved under specific deposition conditions.
The study investigated hybrid coatings CrN + Cr2O3/TiO2 type obtained using the hybrid PVD/ALD technology on a substrate made of Cr-Ni-Mo (316L) stainless steel. Coating of CrN + Cr(2)O(3 )was obtained by the Arc-PVD method. TiO2 using atomic layers deposition was investigated. It were deposited at a variable number of cycles from 200 to 1000 cycles at a constant temperature of 200 ?. Structural studies using scanning and transmission electron microscopy and atomic force microscopy were performed. The chemical composition analysis in the micro-regions was performed using EDS. The study of electrochemical properties was per-formed using potentiodynamic method and electrochemical impedance spectroscopy (EIS) in a 3.5% NaCl solution. As a result of the study, it was found that the best electrochemical properties were shown by hybrid coatings for which the TiO2 layer was obtained in 500 ALD cycles. Based on microscopic studies with diffraction and spectroscopic analysis, the structure of the tested coatings was related to electrochemical properties, and the influence of deposition conditions on corrosion resistance was explained. In addition, the tests were supplemented with tests of tribological properties and adhesion of coatings to the substrate.
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