期刊
PLASMA SOURCES SCIENCE & TECHNOLOGY
卷 32, 期 1, 页码 -出版社
IOP Publishing Ltd
DOI: 10.1088/1361-6595/aca560
关键词
low temperature plasma; ion sources; plasma propulsion; materials processing; diagnostics
An overview of low temperature , partially magnetized ion sources is presented in this paper. The pedagogical approach targets an audience without expertise in low temperature devices and provides a tutorial on the basic physics of operation of common ion sources including plasma generation and acceleration methods. The applications in plasma propulsion and materials processing are highlighted. The paper also discusses the current state, challenges, and future prospects of this class of ion sources.
An overview of low temperature, partially magnetized ion sources is presented. This class of devices is broadly characterized by plasma densities below 10(19) m(-3), electron temperatures below 100 eV, and magnetic field strength tailored such that electrons are magnetized whereas ions are not. The overarching approach is pedagogical, targeting an audience that does not necessarily have an expertise in low temperature devices. A tutorial is presented on the basic physics of operation of common ion sources including an overview of standard methods for plasma generation and acceleration. Typical diagnostics and common uses of these plasma sources are also reviewed. Special attention is given to applications in plasma propulsion and materials processing. This class of ion sources is then discussed in the context of the current state of the field, key technical and scientific challenges, and future prospects.
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