4.5 Article

Atomic-Oxygen Number Densities in Ar-O2 DBDs and Post-discharges with Small Initial O2 Fractions: Plug-Flow Model and Experiments

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PLASMA CHEMISTRY AND PLASMA PROCESSING
卷 43, 期 1, 页码 285-314

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SPRINGER
DOI: 10.1007/s11090-022-10293-9

关键词

Dielectric-barrier discharge (DBD); Post-discharge; Atomic oxygen; Argon

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The number densities of oxygen atoms in Ar-O-2 mixtures with small initial O-2 fractions flowing through a dielectric-barrier discharge were calculated using a plug-flow reactor model. The calculations were compared with experimental results and optical emission spectroscopic measurements.
Number densities of oxygen atoms, n(O), in Ar-O-2 mixtures with small initial O-2 fractions, x(O2). < 1%, flowing through a dielectric-barrier discharge (DBD), are calculated using a plug-flow reactor model, presuming that dissociation and excitation of oxygen species are solely driven by energy-transfer from long-lived excited Ar species, collectively denoted as Ar*. The rate by which Ar* species are generated is calculated from the volume density of power dissipated in the DBD. To obtain extended post-discharge (PD) regions with large n(O), experiments were performed with x(O2)( )=100 ppm. For such low O-2 fractions, the time-dependence of n(O) in the DBD and the early PD can be calculated by a closed equation. Calculations are compared with optical emission spectroscopic (OES) results, utilizing the proportionality of O-atom emission intensity at 777.4 nm to n(O). O-atom densities in the PD are made accessible to OES using a tandem setup with a second DBD as sensing discharge. Model testing by experiment is based on the functional dependence of n(O) on DBD-residence time and PD-delay time, respectively. Wall losses of O atoms in asymmetrical DBD reactors are calculated by an alternative to Chantry's equation. The agreement between O-atom densities attained at the DBD exit and experimental results is generally good while the speed of rise of n(O) in the discharge is overestimated, due to the assumption of a constant wall-loss frequency, k(W) Compared with literature data, k(W) is orders of magnitude higher in the DBD and at least one order of magnitude lower in the PD.

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