期刊
OPTIK
卷 271, 期 -, 页码 -出版社
ELSEVIER GMBH
DOI: 10.1016/j.ijleo.2022.170081
关键词
Titanium nitride; High power impulse magnetron sputtering; Surface-enhanced Raman scattering; Glancing angle depositions
类别
资金
- National Electronics and computer Technology Center (NECTEC)
In this study, a surface-enhanced Raman scattering (SERS) substrate was fabricated using titanium nitride nanorods structures (TiN NRs) prepared by high-power impulse magnetron sputtering (HiPIMS) and glancing angle depositions (GLAD) techniques. The surface morphology, crystalline structures, and chemical composition of TiN NRs were characterized, and the efficiency of the generated Raman signal was measured. The results show that TiN NRs are a promising candidate for cost-effective fabrication of SERS substrates.
The surface-enhanced Raman scattering (SERS) substrate was fabricated using titanium nitride nanorods structures (TiN NRs) which were prepared by the combination of high-power impulse magnetron sputtering (HiPIMS) and glancing angle depositions (GLAD) techniques. The surface morphology, crystalline structures and chemical composition of TiN NRs were characterized by field-emission scanning electron microscopy (FE-SEM), grazing incidence X-ray diffraction (GIXRD) and X-ray photoelectron spectroscopy, (XPS) respectively. Additionally, a portable Raman spectroscopy at 532 nm was used to inspect the performance of Raman signal enhancement. The cubic phase of TiN NRs was shown on (111), (200) and (220) planes. The efficiency of the generated Raman signal of Rhodamine 6 G be measured at a detection limit of 10-6 M with a long shelf-life of TiN NR SERS of more than 28 days. According to the experimental results, TiN NRs are a promising candidate for SERS substrates fabricated cost effectively.
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