期刊
OPTICS EXPRESS
卷 30, 期 26, 页码 47992-48003出版社
Optica Publishing Group
DOI: 10.1364/OE.474185
关键词
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类别
资金
- National Natural Science Foundation of China [62127901,61805243, 62075218, 12003034, 62005278]
- Bureau of International Cooperation, Chinese Academy of Sciences [181722KYSB20180015]
- Youth Innovation Promotion Association of the Chinese Academy of Sciences [2019221]
- Key Research Program of Frontier Science, Chinese Academy of Sciences [QYZDJ-SSW-JSC038]
In this paper, a method based on minimization of Zernike gradient polynomial residual (MZGR) is proposed to estimate segment piston errors and correct erroneous phase unwrapping results. Simulations and experiments demonstrate that this method can precisely obtain the segment piston errors under complex aberration forms and varied obscurations, indicating reliable practicality.
In many certain optical metrology cases, the pupil is usually divided into multiple connected domains by secondary mirror spiders, thus producing segment piston errors and leaving a false phase unwrapping result. In this paper, a method based on minimization of Zernike gradient polynomial residual (MZGR) is proposed to estimate segment piston errors and correct erroneous phase unwrapping results. Simulations and experiments demonstrated that this method can obtain the segment piston errors precisely under complex aberration forms and varied obscurations, indicating reliable practicality. Comparison to the 4D commercial solution, the RMS (root-mean-square) of the residual decreased from 0.154 lambda to 0.020 lambda.(c) 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement
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