Embedded racetrack microring resonator sensor based on GeSbSe glasses

In this article, a compact racetrack double microring resonator (MRR) sensor based on Ge28Sb12Se60 (GeSbSe) is investigated. The sensor device consists of a racetrack microring, an embedded small microring, and a strip waveguide. Electron beam lithography (EBL) and dry etching are used to fabricate the device. The compact racetrack double MRR device are obtained with Q-factor equal to 7.17 x 104 and FSR of 24 nm by measuring the transmission spectrum. By measuring different concentrations of glucose solutions, a sensitivity of 297 nm/RIU by linear fitting and an intrinsic limit of detection (iLOD) of 7.40 x 10-5 are obtained. It paves the way for the application of chalcogenide glasses in the field of biosensing.& COPY; 2023 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement

Automated summary

This article investigates a compact racetrack double microring resonator (MRR) sensor based on Ge28Sb12Se60 (GeSbSe). The sensor device consists of a racetrack microring, an embedded small microring, and a strip waveguide, fabricated using electron beam lithography (EBL) and dry etching. The compact racetrack double MRR device is obtained with a Q-factor equal to 7.17 x 10^4 and FSR of 24 nm by measuring the transmission spectrum. Sensitivity of 297 nm/RIU by linear fitting and an intrinsic limit of detection (iLOD) of 7.40 x 10^-5 are obtained by measuring different concentrations of glucose solutions. It paves the way for the application of chalcogenide glasses in the field of biosensing.