4.6 Article

Low-cost and simple fabrication of hierarchical Al nanopit arrays for deep ultraviolet refractive index sensing

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NANOTECHNOLOGY
卷 34, 期 10, 页码 -

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IOP Publishing Ltd
DOI: 10.1088/1361-6528/aca7cc

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hierarchical Al nanopit arrays; local surface plasmon resonance; refractive index sensing

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A simple non-lithographic method was proposed to fabricate hierarchical Al nanopit arrays for deep ultraviolet refractive index sensing. By adjusting the Al deposition thickness on the array, tunable plasmonic properties in the DUV region were achieved.
Herein, we proposed a simple non-lithographic way to fabricate hierarchical Al nanopit arrays performed as deep ultraviolet (DUV, 200-300 nm) refractive index sensing. Only by adjusting the Al deposition thickness on the Al nanopit array, the hierarchical Al nanopit arrays with tunable plasmonic properties in the DUV region were obtained. The prepared hierarchical Al nanopit arrays are of very good time stability and its RI sensitivity and concentration detection limit of adenine ethanol solution reach 311 nm/RIU and 5x10-6M,

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