4.8 Article

Twin-Boundary Reduced Surface Diffusion on Electrically Stressed Copper Nanowires

期刊

NANO LETTERS
卷 22, 期 22, 页码 9071-9076

出版社

AMER CHEMICAL SOC
DOI: 10.1021/acs.nanolett.2c03437

关键词

nanotwin; surface diffusion; electromigration; copper nanowire; atomic migration energy

资金

  1. Ministry of Science and Technology, Taiwan [MOST 108-2221-E-007-052-MY3, 108-2112-M-007-023-MY3, 111-2221-E-007-092-MY2, 1112634-F-A49-008, 111-2221-E-007-087-MY3, 111-2112-M007-028-MY3, 111-2113-M-007-025]
  2. National Tsing Hua University [111Q2711E1]
  3. Center for Semiconductor Technology Research of National Yang Ming Chiao Tung University from The Featured Areas Research Center Program within MOE in Taiwan

向作者/读者索取更多资源

Surface diffusion is closely related to crystal orientation and surface structure, and fast surface diffusion accelerates phase transformation and structural evolution of materials. In this study, researchers observed that a copper nanowire with dense coherent twin-boundary (CTB) defects evolved into a zigzag configuration under electric-current driven surface diffusion. The hindrance at the CTB-intercepted concave triple junctions reduced the effective surface diffusivity significantly. This finding offers a defect-engineering method for developing robust interconnect materials against electromigration-induced failures in nanoelectronic devices.
Surface diffusion is intimately correlated with crystal orientation and surface structure. Fast surface diffusion accelerates phase transformation and structural evolution of materials. Here, through in situ transmission electron microscopy observation, we show that a copper nanowire with dense nanoscale coherent twin-boundary (CTB) defects evolves into a zigzag configuration under electric-current driven surface diffusion. The hindrance at the CTB-intercepted concave triple junctions decreases the effective surface diffusivity by almost 1 order of magnitude. The energy barriers for atomic migration at the concave junctions and different faceted surfaces are computed using density functional theory. We proposed that such a stable zigzag surface is shaped not only by the high-diffusivity facets but also by the stalled atomic diffusion at the concave junctions. This finding provides a defect-engineering route to develop robust interconnect materials against electromigration-induced failures for nanoelectronic devices.

作者

我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。

评论

主要评分

4.8
评分不足

次要评分

新颖性
-
重要性
-
科学严谨性
-
评价这篇论文

推荐

暂无数据
暂无数据