Development of a dual-stator piezoelectric motor operated in resonance and quasi-static states

A dual-stator piezoelectric motor that can work in resonant and quasi-static states is proposed in this study to achieve high speed and high resolution cross-scale output. Two piezoelectric stators with a frequency of 1:2 and a vibration amplitude ratio of 2:1 are used for driving the sliding table with multipoint friction coupling to produce asymmetric sawtooth wave vibration. Then, they are used with the inertia force of the sliding table to achieve stepping motion. A dual-stator piezo-electric motor prototype is designed, and modal analysis is conducted using ANSYS software to obtain the resonant frequencies of the longitudinal vibration modes of the two stators. The dy-namic model is established, and the numerical analysis is performed to obtain the trajectory and output characteristics of the sliding table. Finally, the prototype of the piezoelectric motor is constructed. Experimental results show that the minimum speed of the piezoelectric motor is 0.013 mm/s, the resolution is 0.5 mu m, the maximum speed is 11.14 mm/s, and the maximum load is 40 g.

Automated summary

This study proposes a dual-stator piezoelectric motor that can work in resonant and quasi-static states to achieve high speed and high resolution cross-scale output. The motor utilizes two piezoelectric stators with a frequency of 1:2 and a vibration amplitude ratio of 2:1 to drive a sliding table with multipoint friction coupling, generating asymmetric sawtooth wave vibration. Combined with the inertia force of the sliding table, the motor achieves stepping motion. A prototype is designed and modal analysis is conducted to determine the resonant frequencies. Numerical analysis is performed to obtain the trajectory and output characteristics of the sliding table. Experimental results show that the motor has a minimum speed of 0.013 mm/s, resolution of 0.5 mu m, maximum speed of 11.14 mm/s, and maximum load of 40 g.