期刊
MATERIALS & DESIGN
卷 224, 期 -, 页码 -出版社
ELSEVIER SCI LTD
DOI: 10.1016/j.matdes.2022.111297
关键词
Pressure Sensor; Piezoresistive effect; Stress amplification; SiC
资金
- DFAT partnership grant Aus4Innovation [A4I236]
- Australian Research Council [LP160101553, DP220101252]
- Ho Chi Minh City Department of Science and Technology of Vietnam [12/2021/HD-QKHCN]
- Griffith Postdoctoral Fellowship
- Griffith IMPACT Spotlight
SiC-based pressure sensors with excellent properties in mechanical, electrical, thermal, and chemical aspects show great potential for harsh environment applications. This study presents the design, fabrication, and characterization of a highly sensitive and robust 3C-SiC/Si pressure sensor, which utilizes a stress amplification structure and a chemical protective thin film to enhance the sensor's performance.
SiC based pressure sensors show tremendous promise for harsh environment applications thanks to their excellent mechanical, electrical, thermal, and chemical properties. This paper presents the design, fabri-cation, and characterisation of a highly sensitive and robust 3C-SiC/Si pressure sensor. The sensor utilises a stress amplification structure consisting of four Si pillars built up from the 3C-SiC/Si membrane, sup-porting a series of released n-type 3C-SiC sensing elements. When pressure is applied to the diaphragm, the pillars act to locally concentrate and amplify strain in the 3C-SiC sensing elements, resulting in over 7 times higher stresses/strains in these sensing elements compared to a traditional structure. Additionally, the front side of the sensor is fully covered by a 3C-SiC thin film, which provides a strong chemical pro-tective capability, allowing the sensor to operate in harsh chemically corrosive environments. The robust device utilises the full Wheatstone bridge to negate the effects of temperature. Experimental results show that the fabricated sensor is highly stable, repeatable, has a high sensitivity of 0.276 mV/V/kPa and a max-imum non-linearity of 2.2 % in the 0-100 kPa region. The results indicate that this smart-structure pres-sure sensor is promising for applications that require highly precise pressure sensing in aggressively corrosive environments.(c) 2022 The Authors. Published by Elsevier Ltd. This is an open access article under the CC BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/).
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据