期刊
JOURNAL OF CRYSTAL GROWTH
卷 607, 期 -, 页码 -出版社
ELSEVIER
DOI: 10.1016/j.jcrysgro.2023.127104
关键词
A1; Characterization; Defects; A3; Chemical vapor deposition processes; Hot wall epitaxy; Selective epitaxy; B2; Semiconducting materials
4H-SiC trenches were filled by chemical vapor deposition (CVD) using a gas system consisting of trichlorosilane, (TCS:C2H4:H2). The effects of Cl/Si ratio and growth pressure on the coverage distribution across trenches and the filling efficiency were investigated. Using the optimized process at Cl/Si = 43.5, 8 μm deep 4H-SiC trenches with an aspect ratio of 3 were completely filled at a filling rate of 2.8 μm/h and obtained a flat end surface without void defects.
4H-SiC trench filling has been accomplished by chemical vapor deposition (CVD) with a gas system composed of trichlorosilane, (TCS:C2H4:H2). The influences of Cl/Si ratio and growth pressure on the coverage distribution across trenches and the corresponding filling efficiency were investigated. Using the optimized process at Cl/Si = 43.5, the 8 mu m deep 4H-SiC trenches with an aspect ratio of 3, were completely filled at a filling rate of 2.8 mu m/ h and acquired a flat end surface without void defects.
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