期刊
IEEE TRANSACTIONS ON ELECTRON DEVICES
卷 70, 期 1, 页码 261-268出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2022.3222662
关键词
Digital holographic microscope (DHM); liquid density; piezoelectric micromachined ultrasonic transducer (PMUT); resolution; resonant frequency; sensitivity
In this article, a liquid density sensor based on an aluminum nitride (AlN) piezoelectric micromachined ultrasonic transducer (PMUT) is reported. It addresses the drawbacks of traditional liquid density sensors by utilizing CMOS-compatible AlN as the piezoelectric material and measuring the change in resonant frequency of the PMUT to calculate the liquid density.
As an important physical parameter of liquids, the liquid density plays an important role in many applications. As a result, the development of liquid density sensors is critical. However, current liquid density sensors have drawbacks, such as large size of conventional liquid density sensors, low quality factor of microcantilever beam structures, low sensitivity of quartz crystal tuning forks, and high operating frequency requirement of surface-acoustic-wave Love-mode resonators. In this article, we report an aluminum nitride (AlN) piezoelectric micromachined ultrasonic transducer (PMUT)-based liquid density sensor to mitigate the aforementioned drawbacks of traditional liquid density sensors. The PMUT sensor utilizes CMOS-compatible AlN as the piezoelectric material. This sensor operates by measuring the change in resonant frequency of the PMUT to calculate the liquid density. In an experiment, the resonance of the PMUT sensor is measured by a digital holographic microscope (DHM), which allows direct measurement of the PMUT surface displacement, providing intuitive vibration amplitude and mode. Moreover, the DHM-based optical measurement approach has a higher sensitivity than the conventional electrical impedance-based measurement approach, allowing measurement of weak PMUT vibrations in dense liquids. The quality factor (Q) value of the PMUT sensor is measured to be 49.38 in water. A high sensitivity of 12.71 kHz/(g.cm(-3))) was determined for this sensor by measuring the resonant frequencies immersed in different glycerol aqueous solutions. We measured 12 PMUTs and the maximum deviation of resonant frequency between different PMUTs is 9.85%. For the first time, the resolution of the PMUT density sensor is determined to be 5.9 x 10(-4 )g.cm(-3)..
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据