4.6 Article

Al0.18Ga0.82N/GaN Two-Dimensional Electron Gas-Based Ultraviolet Photodetectors With Symmetrical Interdigitated Structure

期刊

IEEE TRANSACTIONS ON ELECTRON DEVICES
卷 70, 期 1, 页码 140-146

出版社

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2022.3221356

关键词

AlGaN/GaN; gain mechanism; interdigitated structure; transport model; ultraviolet (UV)photodetectors (PDs)

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Fabrication and comprehensive characterizations of Al0.18Ga0.82N/GaN 2DEG-based UV PD with symmetrical interdigitated structure are reported. The device exhibits a responsivity of 800 A/W, EQE of 3.33 x 10(5)%, and a dark current of 3 x 10(-8) A. Transient response characteristic is improved with a rise time of 25 ms and a fall time of 21 ms. The 2DEG-based UV PD demonstrates a broadband nature with a response spectrum from 300 to 360 nm and a cutoff wavelength of 365 nm.
fabrication and comprehensive characterizations of Al0.18Ga0.82N/GaN two-dimensional electron gas (2DEG)-based ultraviolet (UV) photodetector (PD) with symmetrical interdigitated structure are reported. The results reveal a good performance for the device with a responsivity of 800 A/W at 10 V corresponding to a high external quantum efficiency (EQE) of 3.33 x 10(5)% and a dark current of 3 x 10(-8) A at -8 V. Nevertheless, the rise time of 25 ms and the fall time of 21 ms are obtained by improving the transient response characteristic. Moreover, the fabricated 2DEG-based UV PD exhibits a broadband nature with response spectrum from 300 to 360 nm and a cutoff wavelength of 365 nm in agreement with the GaN bandgap. In addition, the performances of our devices are also optimized by varying the width and spacing of the interdigitated 2DEG structure. Furthermore, several physical models have been applied to convincingly explain the gain mechanism and high-temperature dark current transport mechanism of the proposed devices. This investigation paves the way for further improving the device detection capabilities.

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