4.6 Article

Unveiling Resistance Switching Mechanisms in Undoped HfOx Ferroelectric Tunnel Junction Using Low-Frequency Noise Spectroscopy

期刊

IEEE ELECTRON DEVICE LETTERS
卷 44, 期 2, 页码 345-348

出版社

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2022.3231809

关键词

Iron; Hafnium oxide; Switches; Resistance; Spectroscopy; 1; f noise; Tunneling; Ferroelectric tunnel junction (FTJ); low-frequency noise (LFN); resistive random-access memory (RRAM)

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We demonstrate that the resistance switching of an undoped hafnium oxide-based ferroelectric tunnel junction is influenced by both ferroelectric domain switching and the redistribution of oxygen vacancies within the hafnium oxide. The resistance switching mechanism varies depending on the program bias applied to the tunnel junction. Through low-frequency noise spectroscopy, we present a precise method for distinguishing two distinct resistance switching processes intrinsic to the tunnel junction.
We demonstrate that the resistance switching (RS) of an undoped hafnium oxide (HfOx)-based ferroelectric tunnel junction (FTJ) is affected not only by ferroelectric domain switching of HfOx but also by the redistribution of oxygen vacancies inside HfOx, known as the working principle of resistive random-access memory. It is revealed that the RS mechanism varies depending on the program bias applied to FTJ. Through low-frequency noise spectroscopy, a precise method for distinguishing two distinct RS processes intrinsic to FTJ is presented.

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