期刊
IEEE ELECTRON DEVICE LETTERS
卷 44, 期 1, 页码 112-115出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2022.3226426
关键词
Diamond MOSFET; heteroepitaxial diamond; high voltage; misoriented diamond; NO2 p-type doping
In this study, a NO2 p-type doped and Al2O3 bilayer passivated diamond metal-oxide-semiconductor field-effect transistor (MOSFET) was fabricated on a misoriented heteroepitaxial diamond substrate. The MOSFET exhibited a high breakdown voltage of 3659 V, the highest reported among diamond MOSFETs. MOSFETs with a gate length of 2.5 μm showed a maximum drain current density of 372 mA/mm and a maximum available power density (Baliga's figure-of-merit) of 173 MW/cm(2). Moreover, the maximum mobility was estimated to be 187 cm(2)/V center dot s, and the subthreshold swing was 189 mV/dec. This study explores the prospects of misoriented heteroepitaxial diamonds in power electronic device applications.
In this letter, we report an NO2 p-type doped and Al2O3 bilayer passivated diamond metal-oxide-semiconductor field-effect transistor (MOSFET) fabricated on a misoriented heteroepitaxial diamond substrate. The MOSFET demonstrated a high breakdown voltage of 3659 V, the highest reported among diamond MOSFETs. MOSFETs with a gate length of 2.5 mu m exhibited a maximum drain current density of 372 mA/mm and maximum available power density (Baliga's figure-of-merit) of 173 MW/cm(2). In addition, the maximum mobility was estimated to be 187 cm(2)/V center dot s, and the subthreshold swing was 189 mV/dec. This study explores the prospects of misoriented heteroepitaxial diamonds in power electronic device applications.
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