期刊
ADVANCED MATERIALS
卷 27, 期 38, 页码 5778-5784出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.201500699
关键词
atomic layer deposition; complex materials; transition metal dichalcogenides; nano laminates; ceramic plasmonics
类别
资金
- Office of Science, Office of Basic Energy Sciences of the U.S. Department of Energy [DE-AC02-05CH11231]
Complex materials are defined as nanostructured materials with combinations of structure and/or composition that lead to performance surpassing the sum of their individual components. There are many methods that can create complex materials; however, atomic layer deposition (ALD) is uniquely suited to control composition and structural parameters at the atomic level. The use of ALD for creating complex insulators, semiconductors, and conductors is discussed, along with its use in novel structural applications.
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