4.7 Article

Fabrication and characterization of a tiny PZT thick-film longitudinal-bending coupled drive vibrator using electrohydrodynamic jet printing

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Fabrication and characterisation of piezoelectric thick-film microcantilever deposited on stainless steel using electrohydrodynamic jet deposition

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Summary: This paper introduces a method for fabricating PZT thick-film microcantilevers on stainless-steel substrates using E-jet deposition, which allows for batch manufacturing and improved energy and fracture toughness of the PZT active layer. Experimental results demonstrate that the microcantilever has a large vibrational amplitude and a significantly higher Qm value compared to similar-sized thick-film silicon-based microcantilevers.

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