4.8 Article

Strain-Engineered Multilayer Epitaxial Lift-Off for Cost-Efficient III-V Photovoltaics and Optoelectronics

期刊

ACS APPLIED MATERIALS & INTERFACES
卷 15, 期 1, 页码 1184-1191

出版社

AMER CHEMICAL SOC
DOI: 10.1021/acsami.2c18629

关键词

epitaxial lift-off; Multilayer ELO; strain-engineered MELO; photoluminescence; time-resolved PL; chemical mechanical polishing

向作者/读者索取更多资源

A scalable multilayer epitaxial lift-off process is demonstrated, which allows efficient removal of epitaxially grown materials from their host substrate without external strains. The films retain good integrity after lift-off and can be further processed into devices. Cost analysis shows a 4-to-6-fold reduction in cost compared to the single-layer epitaxial lift-off process, making it significant for III-V photovoltaics and other technologies relying on thin-film III-V semiconductors.
The efficient removal of epitaxially grown materials from their host substrate has a pivotal role in reducing the cost and material consumption of III-V solar cells and in making flexible thin-film devices. A multilayer epitaxial lift-off process is demonstrated that is scalable in both film size and in the number of released films. The process utilizes in-built, individually engineered epitaxial strain in each film to tailor the bending without the need for external layers to induce strain. Even without external support layers, the films retain good integrity after the lift-off, as evidenced by photoluminescence measurements. The films can be further processed into devices, demonstrated here with the fabrication of cm-scale solar cells using a three-layer lift-off process. Based on the included cost analysis, the solar cells are fabricated with a facile two-step process from the as-released films. The scalable multilayer lift-off process is highly cost-efficient and enables a 4-to-6-fold reduction in the cost with respect to the single-layer epitaxial lift-off process. The results are therefore significant for III- V photovoltaics and any other technologies that rely on thin-film III-V semiconductors.

作者

我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。

评论

主要评分

4.8
评分不足

次要评分

新颖性
-
重要性
-
科学严谨性
-
评价这篇论文

推荐

暂无数据
暂无数据