期刊
JOURNAL OF MODERN OPTICS
卷 64, 期 6, 页码 596-600出版社
TAYLOR & FRANCIS LTD
DOI: 10.1080/09500340.2016.1252437
关键词
Fabry-Perot interferometer; polydimethylsiloxane; double-parameter sensor
类别
资金
- National Science Foundation of China [11304064, 11304065]
- Science and Technology Foundation of Shandong Province [ZR2013AQ002]
- National Key Technology R&D Program - Special Scientific Research Found of Public Service industry of Quality Inspection [2014BAA02B03, 201410030-03]
We have proposed an ultra-compact double polymer-capped Fabry-Perot interferometer (FPI), which could be used for simultaneously measuring refractive index (RI) and temperature with low cross sensitivity. The designed and fabricated FPIs have double polymer layers which were fabricated by step-curing ultraviolet photoresist (SU-8) and polydimethylsiloxane on the end face of a traditional single-mode fibre. Three samples were fabricated with different Fabry-Perot cavity lengths. Experimental results show that the double polymer structure has higher temperature and RI sensitivities than single-layer structure. About 689.68pm/degrees C (based on the wavelength shift) in the temperature range of 20-75 degrees C and -147.04dB/RIU (based on peak intensity measurement) in the RI range of 1.335-1.355 were measured, respectively. Moreover, the compact structure, high temperature sensitivity and low cross-sensitivity of the FPI make it suitable for integration such as biomedical and microfluidic sensor probe.
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