An Arbitrary Lagrangian Eulerian Approach for Estimating Energy Dissipation in Micromirrors

Quantification and minimisation of energy consumption in resonant MEMS micromirrors is a key aspect for a proper structural design. In this setting, the quality factor Q of the drive mode of the device needs to be estimated and, eventually, improved. In this work, we propose a simulation strategy for the numerical computation of MEMS micromirrors quality factors. Full order Arbitrary Lagrangian Eulerian Navier-Stokes simulations have been performed using a SUPG stabilised Chorin-Themam scheme. Finally, the numerical results are compared with experimental data, highlighting the accuracy and efficiency of the proposed method.

Automated summary

In this study, a simulation strategy for the numerical computation of quality factors in resonant MEMS micromirrors is proposed. The proposed method is validated by comparing the numerical results with experimental data, demonstrating its accuracy and efficiency.