期刊
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
卷 25, 期 2, 页码 297-303出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2016.2529296
关键词
MEMS characterization; ringdown; nonlinear damping; Duffing nonlinearity; quintic nonlinearity
类别
资金
- U.S. Army Research Office within the Michigan State University Group [W911NF-12-1-0235]
- National Science Foundation through the Directorate for Engineering [1234067]
- Defense Advanced Research Projects Agency through the Program Mesodynamic Architectures [FA8650-13-1-7301]
- National Science Foundation within the Stanford Nanofabrication Facility through the National Nanotechnology Infrastructure Network for fabrication [ECS-9731293]
- Div Of Civil, Mechanical, & Manufact Inn
- Directorate For Engineering [1234067] Funding Source: National Science Foundation
We present a technique for estimation of the model parameters for a single-mode vibration of symmetric micromechanical resonators, including the coefficients of conservative and dissipative nonlinearities. The nonlinearities result in an amplitude-dependent frequency and a nonexponential decay, which are characterized from the ringdown response. An analysis of the amplitude of the ringdown response allows one to estimate the linear damping constant and the dissipative nonlinearity, and the zero-crossing points in the ringdown measurement can be used for characterization of the linear natural frequency and the Duffing and quintic nonlinearities of the vibrational mode, which arise from a combination of mechanical and electrostatic effects. [2015-0263]
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