期刊
NANO CONVERGENCE
卷 9, 期 1, 页码 -出版社
SPRINGER
DOI: 10.1186/s40580-022-00334-6
关键词
Chemical solution deposition; Hafnium zirconium oxide; Pt bottom electrodes; Phase transformation; Pt grain size
资金
- National Research Foundation of Korea (NRF) - Ministry of Education [NRF-2022R1A6A1A0305170511]
- Ministry of Science and ICT [NRF-2021R1F1A1050220, 2020M3F3A2A01082329]
- Korea Basic Science Institute (National research Facilities and Equipment Center) - Ministry of Education [2022R1A6C101B762]
- Korea Institute for Advancement of Technology (KIAT) - Korea Government (MOTIE) [P0008458]
- National Research Foundation of Korea [2022R1A6C101B762] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
The effects of the grain size of Pt bottom electrodes on the ferroelectricity of hafnium zirconium oxide (HZO) were studied, and it was found that bottom electrodes with smaller grain sizes could enhance the ferroelectric polarization of HZO thin films.
The effects of the grain size of Pt bottom electrodes on the ferroelectricity of hafnium zirconium oxide (HZO) were studied in terms of the orthorhombic phase transformation. HZO thin films were deposited by chemical solution deposition on the Pt bottom electrodes with various grain sizes which had been deposited by direct current sputtering. All the samples were crystallized by rapid thermal annealing at 700 degrees C to allow a phase transformation. The crystallographic phases were determined by grazing incidence X-ray diffraction, which showed that the bottom electrode with smaller Pt grains resulted in a larger orthorhombic phase composition in the HZO film. As a result, capacitors with smaller Pt grains for the bottom electrode showed greater ferroelectric polarization. The smaller grains produced larger in-plane stress which led to more orthorhombic phase transformation and higher ferroelectric polarization.
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