期刊
RESULTS IN PHYSICS
卷 40, 期 -, 页码 -出版社
ELSEVIER
DOI: 10.1016/j.rinp.2022.105857
关键词
Hexagonal lonsdaleite silicon; HVPE; Heterojunction PN diode; Electrical properties; Hot probe measurement; Mobility; 2H-Si
资金
- Basic Science Research Program [2022R1A2C1003723, 2015R1A6A1A03031833]
- Korea Institute for Advancement of Tech- nology (KIAT) - Korea Government (MOTIE) [G02P17180000611]
This study investigates the electrical properties of 2H-Si semiconductors using a hot-probe measurement. The results show that unintentionally doped 2H-Si microwires have n-type characteristics, and a heterojunction PN diode is successfully fabricated.
Hexagonal 2H polytypes of Si (2H-Si) exhibit promising mechanical and optical properties owing to their crystal structures with quasi-direct bandgap characteristics. However, few studies have investigated the electrical properties of 2H-Si semiconductors. In this study, we used a hot-probe measurement to determine the doping type of 2H-Si microwires (MWs) prepared by hydride vapor-phase epitaxy (HVPE). It was found that the 2H-Si MWs had unintentional n-type characteristics. For the first time, a heterojunction PN diode with n-type 2H-Si MW and p-type Si (100) was fabricated. According to the current-voltage and capacitance-voltage measurements, the n-type doping concentration of the unintentionally doped 2H-Si MWs was 4.3-9.5 x 10(15 )cm(-3) and the electron mobility was 260-580 cm(2)/V.s.
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