期刊
MICROMACHINES
卷 13, 期 10, 页码 -出版社
MDPI
DOI: 10.3390/mi13101609
关键词
gas sensor; tin oxide; micro-heater; MEMS; hydrogen sulfide
类别
资金
- Korea Institute of Industrial Technology under Development of color/light-emitting textile products for detection of industrial harmful materials and prevention of danger [Kitech EH-22-0004]
- Institute of Civil Military Technology Cooperation - Defense Acquisition Program Administration
- Ministry of Trade, Industry and Energy of the Korean government [21-SF-BR-05]
- Korea Innovation Foundation (INNOPOLIS) - Korean government (MSIT) [2020-DD-UP-0348]
- Agency for Defense Development (ADD), Republic of Korea [21-SF-BR-05] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
In order to realize portable gas sensor applications, it is necessary to develop hydrogen sulfide (H2S) microsensors that operate at lower voltages with high response, selectivity, stability, and fast response and recovery times. This study proposes tin (IV)-oxide (SnO2)-based H2S microsensors with different geometrically designed embedded micro-heaters, which provide good detection capability at a low operating voltage.
To realize portable gas sensor applications, it is necessary to develop hydrogen sulfide (H2S) microsensors capable of operating at lower voltages with high response, good selectivity and stability, and fast response and recovery times. A gas sensor with a high operating voltage (>5 V) is not suitable for portable applications because it demands additional circuitry, such as a charge pump circuit (supply voltage of common circuits is approximately 1.8-5 V). Among H2S microsensor components, that is, the substrate, sensing area, electrode, and micro-heater, the proper design of the micro-heater is particularly important, owing to the role of thermal energy in ensuring the efficient detection of H2S. This study proposes and develops tin (IV)-oxide (SnO2)-based H2S microsensors with different geometrically designed embedded micro-heaters. The proposed micro-heaters affect the operating temperature of the H2S sensors, and the micro-heater with a rectangular mesh pattern exhibits superior heating performance at a relatively low operating voltage (3-4 V) compared to those with line (5-7 V) and rectangular patterns (3-5 V). Moreover, utilizing a micro-heater with a rectangular mesh pattern, the fabricated SnO2-based H2S microsensor was driven at a low operating voltage and offered good detection capability at a low H2S concentration (0-10 ppm), with a quick response (<51 s) and recovery time (<101 s).
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