期刊
MICROMACHINES
卷 13, 期 8, 页码 -出版社
MDPI
DOI: 10.3390/mi13081361
关键词
electrodeposition; ITO; morphology; thin films; TiO2
类别
资金
- Coordenacao de Aperfeicoamento de Pessoal de Nivel Superior (CAPES)
- Sistema Nacional de Laboratorios em Nanotecnologias (SisNANO) [CNPq 442601/2019-0]
- Analytical Center of the Federal University of Amazonas (UFAM)
TiO2 thin films were electrodeposited with different deposition times using electrophoretic method, and the structure, morphology and electrical conductivity of the films were found to be affected. Longer deposition time resulted in higher crystallinity, more irregular surface topography, increased overall thickness and decreased electrical conductivity of the films.
TiO2 time-dependent electrodeposited thin films were synthesized using an electrophoretic apparatus. The XRD analysis revealed that the films could exhibit a crystalline structure composed of similar to 81% anatase and similar to 6% rutile after 10 s of deposition, with crystallite size of 15 nm. AFM 3D maps showed that the surfaces obtained between 2 and 10 s of deposition exhibit strong topographical irregularities with long-range and short-range correlations being observed in different surface regions, a trend also observed by the Minkowski functionals. The height-based ISO, as well as specific surface microtexture parameters, showed an overall decrease from 2 to 10 s of deposition, showing a subtle decrease in the vertical growth of the films. The surfaces were also mapped to have low spatial dominant frequencies, which is associated with the similar roughness profile of the films, despite the overall difference in vertical growth observed. The electrical conductivity measurements showed that despite the decrease in topographical roughness, the films acquired a thickness capable of making them increasingly insulating from 2 to 10 s of deposition. Thus, our results prove that the deposition time used during the electrophoretic experiment consistently affects the films' structure, morphology, and electrical conductivity.
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