期刊
LIGHT-SCIENCE & APPLICATIONS
卷 11, 期 1, 页码 -出版社
SPRINGERNATURE
DOI: 10.1038/s41377-022-00966-7
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资金
- European Research Council [676842, 101001005]
- Netherlands Organization for Scientific Research (NWO/OCW)
- Frontiers of Nanoscience program
- Vidi [680-47-541/994]
- Vrij Programma [680-92-18-04]
- European Research Council (ERC) [676842, 101001005] Funding Source: European Research Council (ERC)
The rapid development of high-Q(M) macroscopic mechanical resonators has enabled great advances in optomechanics. The study presents a versatile fabrication method for fully integrated optomechanical structures. By placing a photonic crystal cavity directly above a mechanical resonator, strong optomechanical interaction strengths are achieved.
The rapid development of high-Q(M) macroscopic mechanical resonators has enabled great advances in optomechanics. Further improvements could allow for quantum-limited or quantum-enhanced applications at ambient temperature. Some of the remaining challenges include the integration of high-O m structures on a chip, while simultaneously achieving large coupling strengths through an optical read-out. Here, we present a versatile fabrication method, which allows us to build fully integrated optomechanical structures. We place a photonic crystal cavity directly above a mechanical resonator with high-Q(M) fundamental out-of-plane mode, separated by a small gap. The highly confined optical field has a large overlap with the mechanical mode, enabling strong optomechanical interaction strengths. Furthermore, we implement a novel photonic crystal design, which allows for a very large cavity photon number, a highly important feature for optomechanical experiments and sensor applications. Our versatile approach is not limited to our particular design but allows for integrating an out-of-plane optical read-out into almost any device layout. Additionally, it can be scaled to large arrays and paves the way to realizing quantum experiments and applications with mechanical resonators based on high-Q(M) out-of-plane modes alike.
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