期刊
AIP ADVANCES
卷 12, 期 9, 页码 -出版社
AIP Publishing
DOI: 10.1063/5.0098405
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资金
- Air Force Research Laboratory [FA8650-19-2-9300]
- Directed-Energy-Joint Technology Office (DE-JTO) [N00014-17-2440]
Background doping polarity is crucial for the performance of optoelectronic devices. The capacitance-voltage (CV) measurements on double mesa structures were used to determine the background polarity of the unintentionally doped intrinsic region. The study found that the capacitance varied with the top mesa diameter, indicating an n-type intrinsic region.
Background doping polarity is a critical design parameter for the performance of many optoelectronic devices, including avalanche photodiodes. We have applied a technique by using capacitance-voltage (CV) measurements on double mesa structures with a p-i-n or n-i-p homojunction to determine the background polarity type of the unintentionally doped intrinsic region. Because CV measurements scale with the size of the mesa, they support design flexibility in producing variable-sized top and bottom mesa diameters. In this work, we grew, fabricated, and tested AlGaAsSb and AlInAsSb random alloy double mesa p-i-n structures and undertook CV measurements at 295, 150, and 77 K. It was found that the capacitance varied with the top mesa diameter for both material systems, and not the bottom mesa diameter, indicating that the unintentionally doped intrinsic region is n-type in nature. (C) 2022 Author(s).
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