期刊
SCIENTIFIC REPORTS
卷 12, 期 1, 页码 -出版社
NATURE PORTFOLIO
DOI: 10.1038/s41598-022-19058-y
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资金
- MEXT Elements Strategy Initiative to Form the Core Research Center [JPMXP0112100011]
- JSPS KAKENHI [19K21134]
Ferroelectric thin films have great potential for use in electric devices, and a Bi2SiO5 thin film with (001) orientation was successfully prepared using the pulsed layer deposition technique. By controlling film orientation, a high remanent polarization value was achieved.
Ferroelectric thin films are important because of their great potential for use in various electric devices such as ferroelectric random-access memory. It was expected that Bi2SiO5, a Si-containing ferroelectric material, would show improved ferroelectricity by targeting a film with the (001)-orientation (polar-axis) on the substrate. Although there was a narrow process window for the deposition of the (010)/(001)-oriented Bi2SiO5 thin film, it was successfully prepared on a (101)-oriented TiO2 single substrate using the pulsed layer deposition technique. The optimum film deposition conditions and film thickness were found, and in this material, the volume fraction of the (001)-oriented domain reached about 70%. By controlling film orientation to the polar axis, the remanent polarization value of this film was 4.8 mu C cm(-2), which is the highest value among reported Bi2SiO5.
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