期刊
OPTICAL MATERIALS EXPRESS
卷 12, 期 11, 页码 4375-4383出版社
Optica Publishing Group
DOI: 10.1364/OME.474200
关键词
-
资金
- Engineering and Physical Sciences Research Council [EP/P013597/1, EP/R03480X/1, EP/T019697/1, EP/V004859/1]
- Innovate UK [50414]
- Royal Academy of Engineering
This study demonstrates the first heterogeneous integration of pre-fabricated lithium niobate photonic waveguide devices onto a silicon nitride waveguide platform using a transfer-printing approach. The fabrication process developed allows the compatibility of free-standing lithium niobate membrane devices with back-end integration onto photonic integrated circuits.
The heterogeneous integration of pre-fabricated lithium niobate photonic waveguide devices onto a silicon nitride waveguide platform via a transfer-printing approach has been demonstrated for the first time. A fabrication process was developed to make free-standing lithium niobate membrane devices compatible with back-end integration onto photonic integrated circuits. Micro-ring resonators in membrane format were lithographically defined by using laser direct writing and plasma dry etching. The lithium niobate micro-ring resonators were then transferred from their host substrate and released onto a silicon nitride waveguide chip. An all-pass ring resonator transmission spectrum was obtained in the 1.5 mu m to 1.6 mu m wavelength range, with a measured loaded Q-factor larger than 3.2 x 104.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据