期刊
JOURNAL OF MATERIALS RESEARCH
卷 31, 期 7, 页码 824-831出版社
CAMBRIDGE UNIV PRESS
DOI: 10.1557/jmr.2016.100
关键词
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Layered molybdenum disulfide (MoS2) has attracted great attention owing to its unique properties. However, synthesizing large area thin film with high crystal quality and uniformity remains a challenge. The present study explores large scale MoS2 growth methods, i.e., two-step method of sputtering-chemical vapor deposition and direct sputtering method, and applies them to fabricate field effect transistors and supercapacitors, respectively. The thickness modulated MoS2 films by two-step method exhibited high field effect mobility [similar to 12.24 cm(2)/(V s)] and current on/off ratio (similar to 10(6)). The direct sputtering of MoS2 demonstrated excellent electrochemical performance with a high capacitance (similar to 30 mF/cm(2)) and cyclic stability upto 5000 cycles. Our growth methods reported here for the large scale MoS2 with high uniformity can trigger the development of several important technologies in two-dimensional materials.
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