One-Stage Femtosecond Laser-Assisted Deposition of Gold Micropatterns on Dielectric Substrate

In this study, a simple one-stage laser-assisted metallization technique based on laser-induced backside wet etching and laser-induced chemical liquid-phase deposition is proposed. It allows for the fabrication of gold micropatterns inside the laser-written trace on a glass substrate. The reduction and deposition of gold inside and outside the laser-ablated channel were confirmed. The presence of Au nanoparticles on the surface of the laser-written micropattern is revealed by atomic force microscopy. The specific resistivity of the gold trace formed by ultrafast light-assisted metal micropatterning on a dielectric glass substrate is estimated as 0.04 +/- 0.02 m ohm center dot cm. The obtained results empower the method of the selective laser-assisted deposition of metals on dielectrics and are of interest for the development of microelectronic components and catalysts, heaters, and sensors for lab-on-a-chip devices.

Automated summary

In this study, a simple laser-assisted metallization technique was proposed for fabricating gold micropatterns on a glass substrate. The technique allows for selective laser-assisted deposition of metals and has potential applications in microelectronic components and lab-on-a-chip devices.