期刊
JOURNAL OF MATERIALS PROCESSING TECHNOLOGY
卷 227, 期 -, 页码 200-215出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.jmatprotec.2015.08.013
关键词
Fiber laser; Grooving; Micro-machining; Silicon; Water-jet assisted
资金
- Department of Science and Technology, New Delhi, India
- Board of Research on Nuclear Science (BRNS), Mumbai, India
Potential of fiber laser grooving in silicon has been investigated with continuous wave beam and modulated beam of micro-second durations. Though silicon shows considerably high transparency for the utilized laser wavelength (1.07 mu m), due to the increase of absorption coefficient with temperature its micro-machining is feasible with good precision by laser. A co-axial water-jet has been employed for ejecting out the molten silicon effectively and simultaneously for rapid cooling. This in turn, overcomes the limitation of micro-machining of silicon with laser pulses of relatively longer durations and alleviates the oxidation problem also. It has been observed that with increasing water-jet speed at constant laser parameters, spatter and recast are reduced. Grooves of controlled depth in 14-520 mu m range, free from micro-cracks and thermal damage could be obtained by controlling the laser and process parameters. Compared to argon-jet assisted laser grooving this technique produced grooves of relatively better quality in terms of lesser micro-cracks, spatter and thermal damage. (C) 2015 Elsevier B.V. All rights reserved.
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