Microstructural evolution and tribology of Mo-doped diamond like carbon nanocomposite film

To explore the microstructure and tribology property evolution of diamond-like carbon (DLC) film with variable Mo concentrations, Mo-doped DLC films were prepared by magnetron sputtering equipment. The results showed that the Mo concentration in the DLC films increased from 2.1 to 30 at% with the Ar/C2H2 gas flow ratio (3:1-9:1). Mo was dispersed in DLC film at a low doping concentration (2.1 at%). Moreover, MoC nanocrystals were present, and a nanocrystal/amorphous microstructure was formed at a high doping concentration (& GE;8.3 at %). The DLC films with 2.1 at% Mo showed the best adhesion (200 mN) and the minimum wear rate (1.47 x 10-8 mm3/ N.m), and high Mo concentration (& GE;8.3 at%) was detrimental to wear resistance and adhesion.

Automated summary

The microstructure and tribology property evolution of Mo-doped DLC films were investigated. It was found that a nanocrystal/amorphous structure was formed at high Mo concentration, which had an impact on adhesion and wear resistance.