4.7 Article

Highly porous Fe2O3-SiO2 layer for acoustic wave based H2S sensing: mass loading or elastic loading effects?

期刊

SENSORS AND ACTUATORS B-CHEMICAL
卷 367, 期 -, 页码 -

出版社

ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2022.132160

关键词

SAW sensor; H2S; Fe2O3-SiO2; Mass loading; Elastic loading

资金

  1. National Natural Science Foundation of China [11805158, 61178018]
  2. Engineering Physics and Sci-ence Research Council of UK [EPSRC EP/P018998/1]

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In this study, a highly porous Fe2O3-SiO2 layer was prepared and applied on the surface of a SAW device for H2S sensing. By adjusting the Fe/Si molar ratio, the pore volume, pore distribution and H2S adsorption capacity of the layer can be controlled, optimizing the sensing performance of the sensor.
A highly porous Fe2O3-SiO2 layer prepared using sol-gel and spin-coating methods was applied on the surface of a surface acoustic wave (SAW) device for H2S sensing. SiO2 in this sensing layer serves as a porous support for dispersing Fe(2)O(3 )nanoparticles, and Fe(2)O(3 )nanoparticles can effectively adsorb and react with H2S molecules. By changing the Fe/Si molar ratio in this Fe2O3 -SiO2 layer, its pore volume, pore distribution and H2S adsorption capacity can be adjusted, the contribution of mass loading effect and the elastic loading effect toward the frequency response of the sensor can be controlled, and the sensing performance of the sensor can be optimized. The optimized sensing response is - 4.4 kHz toward 100 ppm H2S , with a good selectivity and reproducibility operated at room temperature (25 ?).

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