4.5 Article

High performance ultraviolet A/ultraviolet C detector based on amorphous Ga2O3/ZnO Nanoarrays/GaN structure

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ELSEVIER
DOI: 10.1016/j.physe.2022.115398

关键词

Ga2O3; ZnO; GaN; Photodetector

资金

  1. LiaoNing Revitalization Talents Pro-gram [XLYC1807004]
  2. Joint Research Fund Liaoning-Shenyang National Laboratory for Materials Science [2019JH3/30100005, 2019010281-JH3/301]
  3. Guangxi Key Laboratory of Precision Naviga-tion Technology and Application, Guilin University of Electronic Tech-nology [ZHZ2019005]
  4. Open Foundation of Zhenjiang Key Laboratory [DH2022015]

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A high-performance ultraviolet (UV) photodetector based on amorphous Ga2O3/ZnO nanoarrays on p-GaN film was successfully fabricated. This detector exhibits excellent UV sensing properties in the UV-A/UV-C region with fast response without external bias. The high photosensitivity is attributed to the geometry of the match-like Ga2O3/ZnO nanoarrays and the emergence of built-in field between the amorphous Ga2O3 and ZnO interface. These findings provide a new method to enhance the ZnO/GaN heterostructure for broadband ultraviolet sensing applications.
High-performance ultraviolet (UV) photodetector was fabricated based on amorphous Ga2O3/ZnO nanoarrays (NRs) on p-GaN film. The obtained detector displays excellent UV sensing properties which covers UV-A/UV-C region with fast response without external bias. The high photosensitivity can be ascribed to the geometry of the match-like Ga2O3/ZnO NRs and emergence of the built-in field between the amorphous Ga2O3 and ZnO interface. The results will provide a new method to improve the ZnO/GaN heterostructure for applications in broadband ultraviolet sensing.

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