期刊
JOURNAL OF LIGHTWAVE TECHNOLOGY
卷 34, 期 19, 页码 4615-4619出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JLT.2016.2528411
关键词
Chemical vapor deposition; diamond-like carbon; long-period gratings; optical fiber sensors; plasma-based processing; reactive ion etching; refractive index sensing; thin films
资金
- Natural Sciences and Engineering Research Council of Canada
- Canada Research Chairs Program
- National Science Centre of Poland [2014/14/E/ST7/00104]
This paper presents an application of reactive ion etching followed by diamond-like carbon nanooverlay deposition using radio frequency plasma-enhanced chemical vapor deposition method for effective tuning of the refractive index (RI) sensitivity of long-period gratings (LPGs). Both etching and deposition take place within one process. Combination of both plasma-based processes allows for well-controlled tuning of the LPG sensorial response up to its operation at both dispersion turning point of higher order cladding modes and mode transition regime. As a result of the processing, the RI sensitivity has been enhanced up to over 12 000 nm/RIU per single resonance in narrow RI range (1.3344-1.3355 RIU) and over 2000 nm/RIU in broader RI range (1.34-1.356 RIU). Experimental results have been supported by numerical analyses that show capabilities for further significant improvement of both RI sensitivity and range of RI measured with the enhanced sensitivity.
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